Scheduling Semiconductor Wafer Fabrication Using a New Harmony Search Algorithm Based on Receipt Priority Interval

ZHANG Long; LIU Min; HAO Jinghua; WANG Xionghai; DONG Jun

doi:10.1049/cje.2016.08.043

Volume 25 Issue 5

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ZHANG Long, LIU Min, HAO Jinghua, et al., “Scheduling Semiconductor Wafer Fabrication Using a New Harmony Search Algorithm Based on Receipt Priority Interval,” Chinese Journal of Electronics, vol. 25, no. 5, pp. 866-872, 2016, doi: 10.1049/cje.2016.08.043

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ZHANG Long, LIU Min, HAO Jinghua, et al., “Scheduling Semiconductor Wafer Fabrication Using a New Harmony Search Algorithm Based on Receipt Priority Interval,” Chinese Journal of Electronics, vol. 25, no. 5, pp. 866-872, 2016, doi: 10.1049/cje.2016.08.043

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Scheduling Semiconductor Wafer Fabrication Using a New Harmony Search Algorithm Based on Receipt Priority Interval

doi: 10.1049/cje.2016.08.043

1.
College of Electrical Engineering, Zhejiang University, Hangzhou 310027, China;
2.
Department of Automation, Tsinghua University, Beijing 100084, China;
3.
Tsinghua Technology & Innovation Holdings Co., Ltd., Beijing 100084, China

Funds: This work is supported by the National Key Basic Research and Development Program of China (No.2009CB320602), the National Natural Science Foundation of China (No.61025018, No.61021063, No.61104172), and the National Science and Technology Major Project of China (No.2011ZX02504-008).

More Information

Corresponding author: LIU Min (corresponding author) was born in 1965. He received the Ph.D. degree from Tsinghua University, Beijing, China. He is currently a professor with the Department of Automation, Tsinghua University, the deputy director of the Division of Automation with the Tsinghua National Laboratory for Information Science and Technology, Beijing, and the director of the Research Center for Control and Optimization of Complex Industrial Process, Tsinghua University. He led over 20 important research projects, including the National 973 Program of China, the National Science and Technology Major Project of China, the National Science Fund for Distinguished Young Scholars of China, and the National 863 High-Tech Program of China. He has authored over 100 papers and a monograph supported by the National Defense Science and Technology Book Publishing Fund. His current research interests include intelligent scheduling and intelligent operational optimization of complex manufacturing systems. (Email:lium@mail.tsinghua.edu.cn)
Received Date: 2014-08-07
Rev Recd Date: 2014-12-01
Publish Date: 2016-09-10

Abstract

Abstract

For the scheduling problem of Semiconductor wafer fabrication (SWF), a new Dispatching rule based on the load balance (DRLB) is proposed. Further, a new Harmony search (HS) algorithm based receipt priority interval (HS_rpi) is presented to minimize the mean cycle time. A kind of chaotic sequence is used as the harmony vector. Then, a conversion method is designed to convert the real number harmony vector to the mixed vector representing the priorities of all receipts and the algorithm parameters. In order to increase the algorithm robustness and decrease the scale of the scheduling problem, based on receipt priority interval and DRLB, we give a special conversion method used to convert the above mixed vector to the solution of the scheduling problem of SWF. Computational simulations based on the practical instances validate the proposed algorithm.
- Semiconductor wafer fabrication,
- Harmony search algorithm,
- Receipt priority interval,
- Mean cycle time

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References(17)

References

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