W-Band High-Efficiency Waveguide Slot Array Antenna with Low Sidelobe Levels Based on Silicon Micromachining Technology

YAO Shisen; CHENG Yujian; BAI Hang; FAN Yong

doi:10.1049/cje.2020.00.315

Volume 31 Issue 4

Jul. 2022

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Article Navigation > Chinese Journal of Electronics > 2022 > 31(4): 665-673

YAO Shisen, CHENG Yujian, BAI Hang, et al., “W-Band High-Efficiency Waveguide Slot Array Antenna with Low Sidelobe Levels Based on Silicon Micromachining Technology,” Chinese Journal of Electronics, vol. 31, no. 4, pp. 665-673, 2022, doi: 10.1049/cje.2020.00.315

Citation:

YAO Shisen, CHENG Yujian, BAI Hang, et al., “W-Band High-Efficiency Waveguide Slot Array Antenna with Low Sidelobe Levels Based on Silicon Micromachining Technology,” Chinese Journal of Electronics, vol. 31, no. 4, pp. 665-673, 2022, doi: 10.1049/cje.2020.00.315

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W-Band High-Efficiency Waveguide Slot Array Antenna with Low Sidelobe Levels Based on Silicon Micromachining Technology

doi: 10.1049/cje.2020.00.315

1.
University of Electronic Science and Technology of China, Chengdu 611731, China

Funds: This work was supported in part by the National Key Research and Development Plan of China (2018YFB1801505, 2020YFB1807404) and the National Natural Science Foundation of China (U19A2056, 61631012)

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Author Bio:
received the B.E. degree from University of Electronic Science and Technology of China (UESTC), Chengdu, China, in 2017, where he is currently pursuing the Ph.D. degree. His research interests include millimeter-wave wideband array antennas and beam steering antennas. (Email: shisenyao@126.com)

(corresponding author) received the B.S. degree from University of Electronic Science and Technology of China (UESTC), Chengdu, in 2005, and the Ph.D. degree without going through the conventional master’s degree from Southeast University, Nanjing, China, in 2010. Since 2010, he has been with the School of Electronic Engineering, University of Electronic Science and Technology of China, where he is currently a Professor. Dr. Cheng is also a Senior Member of the Chinese Institute of Electronics. He was a Recipient of the National Excellent Doctorate Dissertation of China in 2012 and the National Science Fund for Excellent Young Scholars in 2016. He is also the Vice President of the Joint IEEE Chapters of Antennas and Propagation Society (APS)/Electromagnetic Compatibility Society (EMCS), Chengdu. He has served as an Associate Editor for IEEE Antennas and Wireless Propagation Letters, and on review boards of various technical journals. His current research interests include microwave and millimeter-wave antennas, and integrated arrays and circuits. (Email: chengyujian@uestc.edu.cn)

received the B.E. degree from Xidian University, Xi’an, China, in 2017, and the M.S. degree from University of Electronic Science and Technology of China (UESTC), Chengdu, China, in 2020, respectively. His current research interest includes millimeter-wave array antenna. (Email: 331679775@qq.com)

received the B.E. degree from Nanjing University of Science and Technology, Nanjing, China, in 1985, and the M.S. degree from University of Electronic Science and Technology of China (UESTC), Chengdu, China, in 1992. He has authored and coauthored over 130 articles. Dr. Fan is a Senior Member of the Chinese Institute of Electronics. He gained the First Award of Science and Technology of National Industry, the Second Award of Science and Technology Progress of Ministry of Electronic Industry, the Third Award of Science and Technology Progress of Ministry of Information Industry, and the Third Award of Science and Technology Progress of Sichuan Province. His current research interests include millimeter-wave and terahertz technology and systems. (Email: yfan@uestc.edu.cn)
Received Date: 2020-09-25
Accepted Date: 2021-10-08

Available Online: 2022-01-10

Publish Date: 2022-07-05

Abstract

Abstract

A high-efficiency waveguide slot array antenna with low sidelobe level (SLL) is investigated for W-band applications. The silicon micromachining technology is utilized to realize multilayer antenna architecture by three key steps of selective etching, gold plating and Au-Au bonding. The radiating slot based on this technique becomes thick with a minimum thickness of 0.2 mm and accompanies with the decrease of slot’s radiation ability. To overcome this weakness, a stepped radiation cavity is loaded on the slot. The characteristic of cavity-loaded slot is investigated to synthesize the low-SLL array antenna. The unequal hybrid corporate feeding network is constructed to achieve sidelobe suppression in the E-plane. A pair of 16 × 8 low-SLL and high-effciency slot arrays is fashioned and confirmed experimentally. The bandwidth with the radiation effciency higher than 80% is 92.3–96.3 GHz. The SLLs in both E- and H-planes are below −19 dB.
- W-band,
- Micromachined waveguide,
- Silicon micromachining,
- Stepped radiation cavity,
- High effciency,
- Sidelobe level (SLL)

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References(32)

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