The Study of a Micro Channel Integrated Gas Flow Sensor

In this paper, a micro channel with integrated gas mass flowsensor is proposed for high sensitivity. The uniqueness of this flowsensor is that there is thermal convection effect on two sides ofdiaphragm, which results in a more sensitive temperature distribution.Flow and temperature characteristics of the novel flow sensor aresimulated at different flow rates. The most sensitive position isobtained, and optimum is 120m--200m when the flow velocityvaries from 0m/s to 5m/s. Compared with traditional flow sensors, this flowsensor has higher measurement precision. The micro channel integratedgas mass flow sensor is fabricated by semiconductor technology, and theimprovement of output signal by flow guide is obvious. When theincoming flow is 5m/s, the output signal can reaches about 4.2V and 3Vfor the flow sensing with and without flow guide.