WU Tianshu, CHEN Shuyu, WU Peng, NIE Shaozhong. A High Precision Software Compensation Algorithm for Silicon Piezoresistive Pressure Sensor[J]. Chinese Journal of Electronics, 2019, 28(4): 748-753. doi: 10.1049/cje.2019.05.001
Citation: WU Tianshu, CHEN Shuyu, WU Peng, NIE Shaozhong. A High Precision Software Compensation Algorithm for Silicon Piezoresistive Pressure Sensor[J]. Chinese Journal of Electronics, 2019, 28(4): 748-753. doi: 10.1049/cje.2019.05.001

A High Precision Software Compensation Algorithm for Silicon Piezoresistive Pressure Sensor

doi: 10.1049/cje.2019.05.001
Funds:  This work is supported by the National Key R&D Program of China (No.2018YFB2003900), the National High Technology Research and Development Program of China (No.2012AA041201), and the National Natural Science Foundation of China (No.61272399, No.61572090).
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  • Corresponding author: NIE Shaozhong (corresponding author) was born in 1965. He received the B.sc. degree in control science from Shenyang University of Technology. He is a senior engineer in Chongqing Chuanyi Automation Co., Ltd. His research interests include pressure sensor and intelligent instrument. (Email:nszsic@126.com)
  • Received Date: 2018-05-18
  • Rev Recd Date: 2018-08-11
  • Publish Date: 2019-07-10
  • There are generally zero drift, sensitivity drift and nonlinear error in silicon piezoresistive pressure sensors due to the inherent characteristics of semiconductor materials. It is necessary to compensate and correct the errors produced so as to meet the requirements of measurement accuracy. In order to further improve the compensation precision, based on the research of various basic software compensation methods, a surface fitting compensation algorithm based on least square method is designed, and the software is implemented on the Visual Basic platform. The experimental results show that the zero drift, sensitivity drift and nonlinear error is effectively eliminated, and the output precision of the sensor is greatly improved.
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