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Ye JIN and Debo WANG, “Study on Static Deflection Model of MEMS Capacitive Microwave Power Sensors,” Chinese Journal of Electronics, vol. x, no. x, pp. 1–8, xxxx doi: 10.23919/cje.2023.00.087
Citation: Ye JIN and Debo WANG, “Study on Static Deflection Model of MEMS Capacitive Microwave Power Sensors,” Chinese Journal of Electronics, vol. x, no. x, pp. 1–8, xxxx doi: 10.23919/cje.2023.00.087

Study on Static Deflection Model of MEMS Capacitive Microwave Power Sensors

doi: 10.23919/cje.2023.00.087
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  • Author Bio:

    Ye JIN JIN Ye was born in China in 2002. She studies at Nanjing University of Posts and Telecommunications for her undergraduate degree. Her interest is MEMS microwave power sensor. (Email: 1059831817@qq.com)

    Debo WANG WANG Debo was born in China in 1983. He received the B.S. degree in electronic science and technology from the Hebei University of Science and technology, Shijiazhuang, China, in 2007, the M.S. degree and the PhD degree in Key Laboratory of MEMS of the Ministry of Education from the southeast university, Nanjing, China, in 2010 and 2012. He is now a post-doctor in Nanjing University and an associate professor of the Nanjing University of Posts and Telecommunication. The discipline of his research focuses on the RF MEMS devices, particularly on microwave power sensor and its package. (Email: wdb@njupt.edu.cn)

  • Corresponding author: Email: wdb@njupt.edu.cn
  • Received Date: 2023-04-02
  • Accepted Date: 2023-10-27
  • Available Online: 2024-02-05
  • In this paper, a static deflection model of MEMS cantilever beam is proposed, which can better study the force deformation of MEMS cantilever beam and the output characteristics of capacitive microwave power sensor. The deflection curve is used to describe the deformation of the cantilever beam and then the overload power and sensitivity of this power sensor is derived. It is found that the overload power decreases with the beam length, and increases with the initial height of beam. The sensitivity increases with the beam length, and has a linear growth relationship with the measuring electrode width. A MEMS dual-channel microwave power sensor is designed, fabricated and measured. At a microwave signal frequency of 10 GHz, the sensitivity of the sensor is measured to be 0.11 V/W for the thermoelectric detection channel and 65.17 fF/W for the capacitive detection channel. The sensitivity calculated by the lumped model is 92.93 fF/W, by the pivot model is 50.88 fF/W, by the deflection model proposed in this work is 75.21 fF/W. Therefore, the theoretical result of the static deflection model is more consistent with the measured result and has better accuracy than the traditional lumped model and pivot model.
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