LI Xiaonan, ZHAO Wuyi, WANG Ming, SONG Tao, YANG Wenhui. Design and Fabrication of a NMR-Spectroscopy Microcoil for Nano-Liter Sample[J]. Chinese Journal of Electronics, 2009, 18(1): 183-186.
Citation: LI Xiaonan, ZHAO Wuyi, WANG Ming, SONG Tao, YANG Wenhui. Design and Fabrication of a NMR-Spectroscopy Microcoil for Nano-Liter Sample[J]. Chinese Journal of Electronics, 2009, 18(1): 183-186.

Design and Fabrication of a NMR-Spectroscopy Microcoil for Nano-Liter Sample

  • Received Date: 2008-02-01
  • Rev Recd Date: 2008-08-01
  • Publish Date: 2009-02-15
  • A new kind of NMR receiving microcoilwith planar shape is presented. It is used in detecting1V-level signal referred as the Free Induction Decay radiated from nano-liter biochemical samples having spin nuclear. It was fabricated by the photolithography and homedeveloped copper electroplating technology. SU-8 photoresist was used for construction of electroplating mask withhigh aspect ratio. Several geometries of planar microcoilfabricated are with ri 200 to 10001m, wire width/separate20 to 801m and optimal number of turns 3 to 7. The Characterization of planar microcoils fabricated were performedwith Agilent Impedance Analyzer 4294A and in agree withprediction by theory. The results for Microcoil 1000 1 under 85MHz is the resistance under AC of 7.25-, inductanceof 285nH and quality value of 21.
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