Design and Fabrication of a NMR-Spectroscopy Microcoil for Nano-Liter Sample

A new kind of NMR receiving microcoilwith planar shape is presented. It is used in detecting1V-level signal referred as the Free Induction Decay radiated from nano-liter biochemical samples having spin nuclear. It was fabricated by the photolithography and homedeveloped copper electroplating technology. SU-8 photoresist was used for construction of electroplating mask withhigh aspect ratio. Several geometries of planar microcoilfabricated are with r_i 200 to 10001m, wire width/separate20 to 801m and optimal number of turns 3 to 7. The Characterization of planar microcoils fabricated were performedwith Agilent Impedance Analyzer 4294A and in agree withprediction by theory. The results for Microcoil 1000 1 under 85MHz is the resistance under AC of 7.25-, inductanceof 285nH and quality value of 21.