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YAO Shisen, CHENG Yujian, BAI Hang, FAN Yong. W-Band High-Efficiency Waveguide Slot Array Antenna with Low Sidelobe Levels Based on Silicon Micromachining Technology[J]. Chinese Journal of Electronics. doi: 10.1049/cje.2020.00.315
Citation: YAO Shisen, CHENG Yujian, BAI Hang, FAN Yong. W-Band High-Efficiency Waveguide Slot Array Antenna with Low Sidelobe Levels Based on Silicon Micromachining Technology[J]. Chinese Journal of Electronics. doi: 10.1049/cje.2020.00.315

W-Band High-Efficiency Waveguide Slot Array Antenna with Low Sidelobe Levels Based on Silicon Micromachining Technology

doi: 10.1049/cje.2020.00.315
Funds:  This work was supported in part by the National Key Research and Development Plan of China (2018YFB1801505, 2020YFB1807404) and the National Natural Science Foundation of China (U19A2056, 61631012)
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  • Author Bio:

    received the B.E. degree from University of Electronic Science and Technology of China (UESTC), Chengdu, China, in 2017, where he is currently pursuing the Ph.D. degree. His research interests include millimeter-wave wideband array antennas and beam steering antennas. (Email: shisenyao@126.com)

    (corresponding author) received the B.S. degree from University of Electronic Science and Technology of China (UESTC), Chengdu, in 2005, and the Ph.D. degree without going through the conventional master’s degree from Southeast University, Nanjing, China, in 2010. Since 2010, he has been with the School of Electronic Engineering, University of Electronic Science and Technology of China, where he is currently a Professor. Dr. Cheng is also a Senior Member of the Chinese Institute of Electronics. He was a Recipient of the National Excellent Doctorate Dissertation of China in 2012 and the National Science Fund for Excellent Young Scholars in 2016. He is also the Vice President of the Joint IEEE Chapters of Antennas and Propagation Society (APS)/Electromagnetic Compatibility Society (EMCS), Chengdu. He has served as an Associate Editor for IEEE Antennas and Wireless Propagation Letters, and on review boards of various technical journals. His current research interests include microwave and millimeter-wave antennas, and integrated arrays and circuits. (Email: chengyujian@uestc.edu.cn)

    received the B.E. degree from Xidian University, Xi’an, China, in 2017, and the M.S. degree from University of Electronic Science and Technology of China (UESTC), Chengdu, China, in 2020, respectively. His current research interest includes millimeter-wave array antenna. (Email: 331679775@qq.com)

    received the B.E. degree from Nanjing University of Science and Technology, Nanjing, China, in 1985, and the M.S. degree from University of Electronic Science and Technology of China (UESTC), Chengdu, China, in 1992. He has authored and coauthored over 130 articles. Dr. Fan is a Senior Member of the Chinese Institute of Electronics. He gained the First Award of Science and Technology of National Industry, the Second Award of Science and Technology Progress of Ministry of Electronic Industry, the Third Award of Science and Technology Progress of Ministry of Information Industry, and the Third Award of Science and Technology Progress of Sichuan Province. His current research interests include millimeter-wave and terahertz technology and systems. (Email: yfan@uestc.edu.cn)

  • Received Date: 2020-09-25
  • Accepted Date: 2021-10-08
  • Available Online: 2022-01-10
  • A high-efficiency waveguide slot array antenna with low sidelobe level (SLL) is investigated for W-band applications. The silicon micromachining technology is utilized to realize multilayer antenna architecture by three key steps of selective etching, gold plating and Au-Au bonding. The radiating slot based on this technique becomes thick with a minimum thickness of 0.2 mm and accompanies with the decrease of slot’s radiation ability. To overcome this weakness, a stepped radiation cavity is loaded on the slot. The characteristic of cavity-loaded slot is investigated to synthesize the low-SLL array antenna. The unequal hybrid corporate feeding network is constructed to achieve sidelobe suppression in the E-plane. A pair of 16 × 8 low-SLL and high-effciency slot arrays is fashioned and confirmed experimentally. The bandwidth with the radiation effciency higher than 80 % is 92.3–96.3 GHz. The SLLs in both E- and H-planes are below −19 dB.
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  • [1]
    B. Fan, Y. Li, R. Zhang, and Q. Fu, “Review on the technological development and application of UAV systems,” Chinese Journal of Electronics, vol.29, no.2, pp.199–207, 2020. doi: 10.1049/cje.2019.12.006
    [2]
    S. Tang and J. Mao, “Evaluation model and method of margin in electromagnetic environmental effects for complex systems,” Chinese Journal of Electronics, vol.30, no.1, pp.171–179, 2021. doi: 10.1049/cje.2020.12.006
    [3]
    Y. R. Ding and Y. J. Cheng, “A tri-band shared-aperture antenna for (2.4, 5.2) GHz Wi-Fi application with MIMO function and 60 GHz Wi-Gig application with beam-scanning function,” IEEE Transactions on Antennas and Propagation, vol.68, no.3, pp.1973–1981, 2020. doi: 10.1109/TAP.2019.2948571
    [4]
    A. Dewantari, J. Kim, S. Jeon, S. Kim, and M. Ka, “Flared SIW antenna design and transceiving experiments for W-band SAR,” International Journal of RF and Microwave Computer-Aided Engineering, vol.28, no.9, pp.1–9, 2018.
    [5]
    H. B. Wang and Y. J. Cheng, “Single-layer dual-band linear-to-circular polarization converter with wide axial ratio bandwidth and different polarization modes,” IEEE Transactions on Antennas and Propagation, vol.67, no.6, pp.4296–4301, 2019. doi: 10.1109/TAP.2019.2905962
    [6]
    J. X. Sun, Y. J. Cheng, and Y. Fan, “Planar ultra-wideband and wide-scanning dual-polarized phased array with integrated coupled-marchand balun for high polarization isolation and low cross-polarization,” IEEE Transactions on Antennas and Propagation, vol.69, no.11, pp.7134–7144, 2021. doi: 10.1109/TAP.2021.3060136
    [7]
    H. B. Wang, Y. J. Cheng, and Z. N. Chen, “Dual-band miniaturized linear-to-circular metasurface polarization converter with wideband and wide-angle axial ratio,” IEEE Transactions on Antennas and Propagation, vol.69, no.12, pp.9021–9025, 2021. doi: 10.1109/TAP.2021.3083820
    [8]
    W. Wu, H. Zhao, J. Huang, Q. Feng, and C. Wang, “Study of a new type of SIW end slot antenna at X-band,” Chinese Journal of Electronics, vol.23, no.4, pp.862–865, 2014.
    [9]
    J. Sun and F. Hu, “Three-dimensional printing technologies for terahertz applications: A review,” International Journal of RF and Microwave Computer-Aided Engineering, vol.30, no.1, pp.171–179, 2021.
    [10]
    Y. Li, L. Ge, J. Wang, B. Ai, M. Chen, Z. Zhang, and Z. Li, “A Ka-band 3-D-printed wideband stepped waveguide-fed magnetoelectric dipole antenna array,” IEEE Transactions on Antennas and Propagation, vol.68, no.4, pp.2724–2735, 2020. doi: 10.1109/TAP.2019.2950868
    [11]
    M. Zhang, K. Toyosaki, J. Hirokawa, M. Ando, et al., “A 60-GHz band compact-range gigabit wireless access system using large array antennas,” IEEE Transactions on Antennas and Propagation, vol.63, no.8, pp.3432–3440, 2015. doi: 10.1109/TAP.2015.2434397
    [12]
    M. Zhang, J. Hirokawa, and M. Ando, “A four-corner-fed double-layer waveguide slot array with low sidelobes developed for a 40 GHz-band DDD system,” IEEE Transactions on Antennas and Propagation, vol.64, no.5, pp.2005–2010, 2016. doi: 10.1109/TAP.2016.2539375
    [13]
    X. Xu, M. Zhang, J. Hirokawa, and M. Ando, “E-band plate-laminated waveguide filters and their integration into a corporate-feed slot array antenna with diffusion bonding technology,” IEEE Transactions on Microwave Theory and Techniques, vol.64, no.11, pp.3592–3603, 2016. doi: 10.1109/TMTT.2016.2602859
    [14]
    D. Kim, Y. Lim, H. Yoon, and S. Nam, “High-efficiency W-band electroforming slot array antenna,” IEEE Transactions on Antennas and Propagation, vol.63, no.4, pp.1854–1857, 2015. doi: 10.1109/TAP.2015.2398129
    [15]
    Z. Qi, Y. Huang, and X. Li, “140GHz low-profile and high-gain slot array antennas,” the 6th Asia-Pacific Conference on Antennas and Propagation, Xi’an, China, pp. 1-3, 2017, DOI: 10.1109/APCAP.2017.8420485
    [16]
    K. Tekkouk, J. Hirokawa, K. Oogimoto, et al., “Corporate-feed slotted waveguide array antenna in the 350-GHz band by silicon process,” IEEE Transactions on Antennas and Propagation, vol.65, no.1, pp.217–225, 2017. doi: 10.1109/TAP.2016.2631132
    [17]
    L. Chang, Y. Li, Z. Zhang, S. Wang, and Z. Feng, “Planar air-filled terahertz antenna array based on channelized coplanar waveguide using hierarchical silicon bulk micromachining,” IEEE Transactions on Antennas and Propagation, vol.66, no.10, pp.5318–5325, 2018. doi: 10.1109/TAP.2018.2862360
    [18]
    P. Zhao, Y. Liu, and X. Lv, “Experimental realization of micromachined terahertz multistepped quasi-diagonal horn antenna,” Microwave and Optical Technology Letters, vol.59, no.10, pp.2644–2648, 2017. doi: 10.1002/mop.30800
    [19]
    S. S. Yao, Y. J. Cheng, M. M. Zhou, Y. F. Wu, and Y. Fan, “D-band wideband air-filled plate array antenna with multistage impedance matching based on MEMS micromachining technology,” IEEE Transactions on Antennas and Propagation, vol.68, no.6, pp.4502–4511, 2020. doi: 10.1109/TAP.2020.2969890
    [20]
    Q. Wang, Y. Duan, and B. Lu, “A novel three-dimensional microstructure fabrication method based on multilevel imprint lithography,” Chinese Journal of Electronics, vol.18, no.4, pp.583–587, 2009.
    [21]
    L. Chang, Y. Li, Z. Zhang, et al., “Low-sidelobe air-filled slot array fabricated using silicon micromachining technology for millimeter-wave application,” IEEE Transactions on Antennas and Propagation, vol.65, no.8, pp.4067–4074, 2017. doi: 10.1109/TAP.2017.2717971
    [22]
    H. Chu, J. Chen, and Y. Guo, “An efficient gain enhancement approach for 60-GHz antenna using fully integrated vertical metallic walls in LTCC,” IEEE Transactions on Antennas and Propagation, vol.64, no.10, pp.4513–4518, 2016. doi: 10.1109/TAP.2016.2593717
    [23]
    S. B. Yeap, Z. N. Chen, and X. Qing, “Gain-enhanced 60-GHz LTCC antenna array with open air cavities,” IEEE Transactions on Antennas and Propagation, vol.59, no.9, pp.3470–3473, 2011. doi: 10.1109/TAP.2011.2161549
    [24]
    R. S. Elliott, “An improved design procedure for small arrays of shunt slots,” IEEE Transactions on Antennas and Propagation, vol.31, no.1, pp.48–53, 1983. doi: 10.1109/TAP.1983.1143002
    [25]
    R. S. Elliott and W. R. O’Loughlin, “The design of slot arrays including internal mutual coupling,” IEEE Transactions on Antennas and Propagation, vol.34, no.9, pp.1149–1154, 1986. doi: 10.1109/TAP.1986.1143947
    [26]
    R. Bayderkhani and H. R. Hassani, “Wideband and low sidelobe slot antenna fed by series-fed printed array,” IEEE Transactions on Antennas and Propagation, vol.58, no.12, pp.3898–3904, 2010. doi: 10.1109/TAP.2010.2078437
    [27]
    Y. F. Wu and Y. J. Cheng, “Conical conformal shaped-beam substrate-integrated waveguide slot array antenna with conical-to-cylindrical transition,” IEEE Transactions on Antennas and Propagation, vol.65, no.8, pp.4048–4056, 2017. doi: 10.1109/TAP.2017.2716404
    [28]
    G. L. Huang, S. G. Zhou, T. H. Chio, H. T. Hui, and T. S. Yeo, “A low profile and low sidelobe wideband slot antenna array fed by an amplitude-tapering waveguide feed-network,” IEEE Transactions on Antennas and Propagation, vol.63, no.1, pp.419–423, 2015. doi: 10.1109/TAP.2014.2365238
    [29]
    T. Potelon, M. Ettorre, and R. Sauleau, “Long slot array fed by a nonuniform corporate feed network in PPW technology,” IEEE Transactions on Antennas and Propagation, vol.67, no.8, pp.5436–5445, 2019. doi: 10.1109/TAP.2019.2917581
    [30]
    R. Shen, X. Ye, J. Xie, Z. Chen, and C. Jin, “A W-band circular box-horn antenna array radiating sum and difference beams with suppressed sidelobe,” IEEE Transactions on Antennas and Propagation, vol.67, no.9, pp.5934–5942, 2019. doi: 10.1109/TAP.2019.2920358
    [31]
    H. Bai, Y. J. Cheng, and S. S. Yao, “High-efficiency two-dimensional low side-lobe level MEMS sub arrayed antenna array,” the 8th Asia-Pacific Conference on Antennas and Propagation, Inchon, Korea (South), pp. 286−288, 2019.
    [32]
    R. Camblor, S. V. Hoeye, M. Fernández, C. V. Antuña, and F. Las-Heras, “Submillimeter wavelength 2-D frequency scanning antenna based on slotted waveguides fed through a phase shifting network,” IEEE Transactions on Antennas and Propagation, vol.65, no.7, pp.3501–3509, 2017. doi: 10.1109/TAP.2017.2700205
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