Turn off MathJax
Article Contents
Qingying REN, Yuxuan LIU, Debo WANG, “Research on Low-frequency Multi-directional Piezoelectric Energy Harvester with Combined Cantilever Beam,” Chinese Journal of Electronics, vol. x, no. x, pp. 1–9, xxxx doi: 10.23919/cje.2023.00.351
Citation: Qingying REN, Yuxuan LIU, Debo WANG, “Research on Low-frequency Multi-directional Piezoelectric Energy Harvester with Combined Cantilever Beam,” Chinese Journal of Electronics, vol. x, no. x, pp. 1–9, xxxx doi: 10.23919/cje.2023.00.351

Research on Low-frequency Multi-directional Piezoelectric Energy Harvester with Combined Cantilever Beam

doi: 10.23919/cje.2023.00.351
More Information
  • Author Bio:

    Qingying REN was born in China in 1987. She received the Ph.D. degree from Southeast University, Nanjing, China, in 2017, in Microelectronics and Solid State Electronics. She is currently a lecturer at the College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, China. The discipline of her research focuses on energy harvesting technology, MEMS sensor, temperature and humidity sensors, LC passive wireless sensors

    Yuxuan LIU was born in China in 2005. She studies at Nanjing University of Posts and Telecommunications for his undergraduate degree. Her interest is piezoelectric energy harvesting technology

    Debo WANG was born in China in 1983. He received the B.S. degree in electronic science and technology from the Hebei University of Science and technology, Shijiazhuang, China, in 2007, the M.S. degree and the PhD degree in Key Laboratory of MEMS of the Ministry of Education from the southeast university, Nanjing, China, in 2010 and 2012. He is now a post-doctor in Nanjing University and an associate professor of the Nanjing University of Posts and Telecommunication. The discipline of his research focuses on the RF MEMS devices, particularly on microwave power sensor and its package. (Email: wdb@njupt.edu.cn)

  • Corresponding author: Email: wdb@njupt.edu.cn
  • Received Date: 2023-11-05
    Available Online: 2024-03-12
  • In order to realize the collection and utilization of low-frequency vibration energy, a multi-directional piezoelectric energy harvester is proposed, which consists of a lower circular arc beam and an upper L-shaped beam. Both the lower and upper beams can achieve multi-directional energy harvesting, and the upper L-shaped beam can also act as a mass block to reduce the resonant frequency. The structure of this energy harvester is optimized. Four different structures are studied with varying combination angles between the upper and lower layers to acquire data related to resonant frequency, vibration shape, stress distribution, open-circuit voltage and output power. Additionally, the performance of each structure is comprehensively prepared and measured to verify its effectiveness. The optimal structure achieved a resonant frequency of 11 Hz and an output power of 57.1 μW at the optimal load resistance of 201 kΩ. Consequently, this work provides valuable reference for the study of low-frequency vibration energy harvesting technology.
  • loading
  • [1]
    E. Iranmanesh, A. Rasheed, W. W. Li, et al., “A wearable piezoelectric energy harvester rectified by a dual-gate thin-film transistor,” IEEE Transactions on Electron Devices, vol. 65, no. 2, pp. 542–546, 2018. doi: 10.1109/TED.2017.2780261
    [2]
    J. S. Ho, A. J. Yeh, E. Neofytou, et al., “Wireless power transfer to deep-tissue microimplants,” Proceedings of the National Academy of Sciences of the United States of America, vol. 111, no. 22, pp. 7974–7979, 2014. doi: 10.1073/pnas.1403002111
    [3]
    Y. Liu, B. H. Hu, Y. Cai, et al., “Design and performance of ScAlN/AlN trapezoidal cantilever-based MEMS piezoelectric energy harvesters,” IEEE Transactions on Electron Devices, vol. 68, no. 6, pp. 2971–2976, 2021. doi: 10.1109/TED.2021.3072612
    [4]
    H. G. Lim, K. W. Seong, E. S. Jung, et al., “Necessity of human middle ear characteristics at design of piezoelectric type round window vibrator,” in 2012 IEEE-EMBS International Conference on Biomedical and Health Informatics, Hong Kong, China, pp. 548–550, 2012.
    [5]
    M. Nourafkan, E. Mohammadi, and N. Manavizadeh, “Influence of the ZnO nanostructures shape on piezoelectric energy harvesters performance,” IEEE Transactions on Electron Devices, vol. 66, no. 11, pp. 4989–4996, 2019. doi: 10.1109/TED.2019.2942777
    [6]
    P. J. Larson and B. C. Towe, “Miniature ultrasonically powered wireless nerve cuff stimulator,” in 2011 5th International IEEE/EMBS Conference on Neural Engineering, Cancun, Mexico, pp. 265–268, 2011.
    [7]
    A. Čeponis, D. Mažeika, and A. Kilikevičius, “Bi-directional piezoelectric multi-modal energy harvester based on saw-tooth cantilever array,” Sensors, vol. 22, no. 8, article no. 2880, 2022. doi: 10.3390/s22082880
    [8]
    D. B. Wang and Y. R. Wang, “A multi-mode spiral piezoelectric energy harvester with wide frequency band,” IEEE Electron Device Letters, vol. 44, no. 11, pp. 1881–1884, 2023. doi: 10.1109/LED.2023.3314428
    [9]
    X. B. Rui, Y. Zhang, Z. M. Zeng, et al., “Design and analysis of a broadband three-beam impact piezoelectric energy harvester for low-frequency rotational motion,” Mechanical Systems and Signal Processing, vol. 149, article no. 107307, 2021. doi: 10.1016/j.ymssp.2020.107307
    [10]
    W. U. Syed, A. Bojesomo, and I. M. Elfadel, “Electromechanical model of a tapered piezoelectric energy harvester,” IEEE Sensors Journal, vol. 18, no. 14, pp. 5853–5862, 2018. doi: 10.1109/JSEN.2018.2841359
    [11]
    F. Lu, H. P. Lee, and S. P. Lim, “Modeling and analysis of micro piezoelectric power generators for micro-electromechanical-systems applications,” Smart Materials and Structures, vol. 13, no. 1, pp. 57–63, 2003. doi: 10.1088/0964-1726/13/1/007
    [12]
    H. B. Fang, J. Q. Liu, Z. Y. Xu, et al., “Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting,” Microelectronics Journal, vol. 37, no. 11, pp. 1280–1284, 2006. doi: 10.1016/j.mejo.2006.07.023
    [13]
    T. Guo, Z. Xu, L. Jin, et al. , “Optimized structure design of a bridge-like piezoelectric energy harvester based on finite element analysis,” in 2017 20th International Conference on Electrical Machines and Systems (ICEMS), Sydney, Australia, pp. 1–5, 2017.
    [14]
    L. Z. Jing, R. Huo, W. K. Wang, et al., “Design and performance analysis of the low-frequency and broadband piezoelectric energy harvester,” IOP Conference Series:Materials Science and Engineering, vol. 242, article no. 012098, 2017. doi: 10.1088/1757-899X/242/1/012098
    [15]
    G. G. Wang, J. Xu, F. G. Yi, et al., “Characteristic analysis of novel double-fork piezoelectric energy harvester, ” in 2017 First International Conference on Electronics Instrumentation & Information Systems (EIIS), Harbin, China, pp. 1–4, 2017.
    [16]
    P. Asthana and G. Khanna, “Enhancing performance of a broadband seesaw piezoelectric energy harvester,” in 2020 7th International Conference on Signal Processing and Integrated Networks (SPIN), Noida, India, pp. 43–47, 2020.
    [17]
    B. Debnath and R. Kumar, “Design and simulation study of a new flared-U shaped springs based MEMS piezoelectric vibration energy harvester,” in 2020 IEEE International Conference on Computing, Power and Communication Technologies (GUCON), Greater Noida, India, pp. 101–105, 2020.
    [18]
    H. B. Qin, S. T. Mo, X. Jiang, et al., “Multimodal multidirectional piezoelectric vibration energy harvester by U-shaped structure with cross-connected beams,” Micromachines, vol. 13, no. 3, article no. 396, 2022. doi: 10.3390/mi13030396
    [19]
    S. Nabavi and L. H. Zhang, “Nonlinear multi-mode wideband piezoelectric MEMS vibration energy harvester,” IEEE Sensors Journal, vol. 19, no. 13, pp. 4837–4848, 2019. doi: 10.1109/JSEN.2019.2904025
    [20]
    D. S. Nguyen, E. Halvorsen, G. U. Jensen, et al., “Fabrication and characterization of a wideband MEMS energy harvester utilizing nonlinear springs,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, article no. 125009, 2010. doi: 10.1088/0960-1317/20/12/125009
    [21]
    K. Tao, L. H. Tang, J. Wu, et al., “Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity,” Journal of Microelectromechanical Systems, vol. 27, no. 2, pp. 276–288, 2018. doi: 10.1109/JMEMS.2018.2792686
    [22]
    N. Wang, C. L. Sun, L. Y. Siow, et al., “AlN wideband energy harvesters with wafer-level vacuum packaging utilizing three-wafer bonding,” in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, USA, pp. 841–844, 2017.
    [23]
    P. C. Huang, T. H. Tsai, and Y. J. Yang, “Wide-bandwidth piezoelectric energy harvester integrated with parylene-C beam structures,” Microelectronic Engineering, vol. 111 pp. 214–219, 2013. doi: 10.1016/j.mee.2013.03.158
    [24]
    Y. T. Hu and Y. Xu, “A wideband vibration energy harvester based on a folded asymmetric gapped cantilever,” Applied Physics Letters, vol. 104, no. 5, article no. 053902, 2014. doi: 10.1063/1.4863923
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索

    Figures(15)  / Tables(5)

    Article Metrics

    Article views (16) PDF downloads(1) Cited by()
    Proportional views
    Related

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return